冠军体育CMP

Copper foil appearance inspection

Name

Parameter

Detection speed:

≤300m/min

Detection width:

800mm-1600mm

Resolution:

Line scan: 0.03 (horizontal) * 0.03 (vertical) mm/pix;

Detection accuracy:

Defect detection accuracy 0.05mm2

Pinhole detection accuracy: ≥0.03mm pinhole can be detected

Overkill/missing rate:

Omission rate: 0%, overkill rate: ≤0.1%

Inspection content: pits, black spots, black lines, oxidation spots, foreign matter, scratches, pinholes and other detectable defects with a gray scale difference of more than 20. 


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